In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system.
Mistry, Kissan, Jones, Alexander, Kao, Manfred, Yeow, Travis Wen-Kai, Yavuz, Mustafa, Musselman, Kevin PJournal:
Nano Express
DOI:
10.1088/2632-959X/ab976c
Date:
May, 2020
File:
PDF, 1.24 MB
2020