Characteristics of Poly-Si Junctionless FinFETs with HfZrO...

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IEEE Transactions on Nanotechnology 2020

Characteristics of Poly-Si Junctionless FinFETs with HfZrO Using Forming Gas Annealing

Lee, Yao-Jen, Chung, Sheng-Ti, Chao, Tien-Sheng
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Year:
2020
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/TNANO.2020.2992797
File:
PDF, 4.09 MB
2020
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