Boron liquid metal alloy ion sources for special focused...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 07 Vol. 38; Iss. 4

Boron liquid metal alloy ion sources for special focused ion beam applications

Bischoff, Lothar, Klingner, Nico, Mazarov, Paul, Pilz, Wolfgang, Meyer, Fabian
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000073
Date:
July, 2020
File:
PDF, 2.00 MB
2020
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