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Buried Metal Deposition on Gallium Arsenide by Laser-Induced Thermochemical Reaction
Tokuda, Jun, Takai, Mikio, Gamo, Kenji, Namba, SusumuVolume:
101
Year:
1987
Journal:
MRS Proceedings
DOI:
10.1557/PROC-101-261
File:
PDF, 1.01 MB
1987