Topography Reduction During Barrier CMP Improved Due to Tantalum Oxidation
Lefevre, Paul, Ina, Katsuyoshi, Sakai, Kenji, Tamai, Kazusei, Rader, ScottVolume:
732
Year:
2002
Journal:
MRS Proceedings
DOI:
10.1557/PROC-732-I4.5
File:
PDF, 234 KB
2002