Dataset for TiN Thin Films Prepared by Plasma-Enhanced...

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Data in Brief 2020 / 5

Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl4) Precursor

Lee, Woo-Jae, Yun, Eun-Young, Lee, Han-Bo-Ram, Hong, Suck Won, Kwon, Se-Hun
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Journal:
Data in Brief
DOI:
10.1016/j.dib.2020.105777
Date:
May, 2020
File:
PDF, 725 KB
2020
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