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Inverted plasmonic lens design for nanometrology applications
Käseberg, T, Siefke, T, Kroker, S, Bodermann, BVolume:
31
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/ab7e6b
Date:
July, 2020
File:
PDF, 1.82 MB
2020