[IEEE 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Hiroshima, Japan (2020.3.23-2020.3.26)] 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer
Moreira, Eurico E., Kuhlmann, Burkhard, Alves, Filipe S., Dias, Rosana A., Cabral, Jorge, Gaspar, Joao, Rocha, Luis A.Year:
2020
DOI:
10.1109/INERTIAL48129.2020.9090090
File:
PDF, 1.31 MB
2020