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[IEEE 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Hiroshima, Japan (2020.3.23-2020.3.26)] 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity
Wang, Shudong, Zhu, Weilong, Shen, Yajing, Ren, Juan, Wei, XueyongYear:
2020
DOI:
10.1109/INERTIAL48129.2020.9090093
File:
PDF, 2.45 MB
2020