Zero-Balance Method for Evaluation of Sealed Cavity...

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Zero-Balance Method for Evaluation of Sealed Cavity Pressure Down to Single Digit Pa Using Thin Silicon Diaphragm

Farisi, Muhammad Salman Al, Hirano, Hideki, Tanaka, Shuji
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Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.2984229
File:
PDF, 2.43 MB
2020
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