Zero-Balance Method for Evaluation of Sealed Cavity Pressure Down to Single Digit Pa Using Thin Silicon Diaphragm
Farisi, Muhammad Salman Al, Hirano, Hideki, Tanaka, ShujiYear:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.2984229
File:
PDF, 2.43 MB
2020