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RF/High-Speed I/O ESD Protection: Co-optimizing Strategy Between BEOL Capacitance and HBM Immunity in Advanced CMOS Process
Wu, Wei-Min, Ker, Ming-Dou, Chen, Shih-Hung, Chen, Jie-Ting, Linten, Dimitri, Groeseneken, GuidoYear:
2020
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2020.2994492
File:
PDF, 4.88 MB
2020