Influence of a Nanoporous Silicon Layer on the Practical Implementation and Specific Features of the Epitaxial Growth of GaN Layers on SiC/por-Si/c-Si Templates
Seredin, P. V., Goloshchapov, D. L., Zolotukhin, D. S., Lenshin, A. S., Khudyakov, Yu. Yu., Mizerov, A. M., Timoshnev, S. N., Arsentyev, I. N., Beltyukov, A. N., Leiste, Harald, Kukushkin, S. A.Volume:
54
Journal:
Semiconductors
DOI:
10.1134/S1063782620050115
Date:
May, 2020
File:
PDF, 4.52 MB
2020