Two Step RIE Process for Diamond‐Based Nanophotonics...

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physica status solidi (a) 2020 / 05

Two Step RIE Process for Diamond‐Based Nanophotonics Structure Formation

Golovanov, Anton V., Luparev, Nikolay V., Troschiev, Sergey Yu., Tarelkin, Sergei A., Shcherbakova, Viktoriia S., Bormashov, Vitaly S.
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Journal:
physica status solidi (a)
DOI:
10.1002/pssa.202000206
Date:
May, 2020
File:
PDF, 552 KB
2020
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