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Acoustofluidics along inclined surfaces based on AlN/Si Rayleigh surface acoustic waves
Wang, Yong, Tao, Xiang, Tao, Ran, Zhou, Jian, Zhang, Qian, Chen, Dongyang, Jin, Hao, Dong, Shurong, Xie, Jin, Fu, Yong QingVolume:
306
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.111967
Date:
May, 2020
File:
PDF, 3.28 MB
2020