A high crystal quality of SiGe Fin fabrication with a Si-rich composition area using the replacement Fin processing
Zan, Ying, Li, Yong-Liang, Cheng, Xiao-Hong, Zhao, Zhi-Qiang, Liu, Hao-Yan, Wu, Zhen-Hua, Du, An-Yan, Wang, Wen-WuJournal:
Chinese Physics B
DOI:
10.1088/1674-1056/ab973e
Date:
May, 2020
File:
PDF, 663 KB
2020