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The Humidity-Induced Sensitivity Amplification Effect in an Ionization Gas Sensor With Silicon Nanostructures
Wang, Bo, Dong, Xusheng, Wang, Zi, Wang, Yanfang, Hou, ZhongyuVolume:
41
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2020.2987948
Date:
June, 2020
File:
PDF, 2.89 MB
2020