Pulsed Ion-Beam Treatment of Germanium Implanted by...

Optoelectronics, Instrumentation and Data Processing 2019 / 9 Vol. 55; Iss. 5

Pulsed Ion-Beam Treatment of Germanium Implanted by Antimony Ions

Batalov, R. I., Bayazitov, R. M., Novikov, G. A., Shustov, V. A., Lyadov, N. M., Novikov, A. V., Bushuikin, P. A., Baidakova, N. A., Drozdov, M. N., Yunin, P. A.
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Volume:
55
Journal:
Optoelectronics, Instrumentation and Data Processing
DOI:
10.3103/S8756699019050017
Date:
September, 2019
File:
PDF, 380 KB
2019
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