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Pulsed Ion-Beam Treatment of Germanium Implanted by Antimony Ions
Batalov, R. I., Bayazitov, R. M., Novikov, G. A., Shustov, V. A., Lyadov, N. M., Novikov, A. V., Bushuikin, P. A., Baidakova, N. A., Drozdov, M. N., Yunin, P. A.Volume:
55
Journal:
Optoelectronics, Instrumentation and Data Processing
DOI:
10.3103/S8756699019050017
Date:
September, 2019
File:
PDF, 380 KB
2019