Effect of conditioner disc wear on frictional, thermal,...

Effect of conditioner disc wear on frictional, thermal, kinetic and pad micro-textural attributes of interlayer dielectric and tungsten chemical mechanical planarization

Mariscal, Juan Cristobal, Dadashazar, Hossein, McAllister, Jeffrey, Sampurno, Yasa, Philipossian, Ara
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Volume:
59
Journal:
Japanese Journal of Applied Physics
DOI:
10.35848/1347-4065/ab9353
Date:
July, 2020
File:
PDF, 1.28 MB
2020
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