Effect of conditioner disc wear on frictional, thermal, kinetic and pad micro-textural attributes of interlayer dielectric and tungsten chemical mechanical planarization
Mariscal, Juan Cristobal, Dadashazar, Hossein, McAllister, Jeffrey, Sampurno, Yasa, Philipossian, AraVolume:
59
Journal:
Japanese Journal of Applied Physics
DOI:
10.35848/1347-4065/ab9353
Date:
July, 2020
File:
PDF, 1.28 MB
2020