The influence of Auânanoparticles presence in PDMS on microstructures creation by ion beam lithography
Romanenko, Oleksandr, SlepiÄka, Petr, Malinsky, Petr, Cutroneo, Mariapompea, Havránek, VladimÃr, Stammers, James, Å vorÄÃk, Václav, Macková, AnnaJournal:
Surface and Interface Analysis
DOI:
10.1002/sia.6821
Date:
June, 2020
File:
PDF, 3.27 MB
2020