Influence of discharge power on the size of the Pd cluster generated with a magnetron plasma gas aggregation cluster source
Liu, Chang, Zhang, Lianhua, Zhang, Sishi, Liu, Fei, Wang, Guanghou, Han, MinJournal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109486
Date:
May, 2020
File:
PDF, 4.57 MB
2020