![](/img/cover-not-exists.png)
Optical Emission Imaging and Modelling Investigations of Microwave Activated SiH 4 /H 2 and SiH 4 /CH 4 /H 2 Plasmas
Mahoney, Edward J.D., Lalji, Alim, Allden, John W.R., Truscott, Benjamin S., Ashfold, Michael Norman Royston, Mankelevich, Yuri A.Journal:
The Journal of Physical Chemistry A
DOI:
10.1021/acs.jpca.0c03396
Date:
June, 2020
File:
PDF, 6.22 MB
2020