Plasma Etching in InAlN/GaN Hemt Technology
Filippov, I. A., Shakhnov, V. A., Velikovskii, L. E., Brudnyi, P. A., Demchenko, O. I.Journal:
Russian Physics Journal
DOI:
10.1007/s11182-020-02006-6
Date:
May, 2020
File:
PDF, 352 KB
2020