[IEEE 2019 25th International Conference on Automation and Computing (ICAC) - Lancaster, United Kingdom (2019.9.5-2019.9.7)] 2019 25th International Conference on Automation and Computing (ICAC) - Influence of Exposure Energy Control for High Voltage Pulsed Xenon Lamp on the Lithography Accuracy of Linear Grating
Ren, Dongxu, Zhao, Zexiang, Li, Bin, Zeng, WenhanYear:
2019
DOI:
10.23919/IConAC.2019.8895223
File:
PDF, 463 KB
2019