On the formation and features of the supra-wavelength grooves generated during femtosecond laser surface structuring of silicon
Allahyari, E., JJ Nivas, J., Skoulas, E., Bruzzese, R., Tsibidis, G.D., Stratakis, E., Amoruso, S.Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.146607
Date:
June, 2020
File:
PDF, 3.80 MB
2020