Magnetic levitation stages for planar and linear scan...

International Journal of Applied Electromagnetics and Mechanics 2020 / 05 Vol. 63; Iss. 1

Magnetic levitation stages for planar and linear scan application with nanometer resolution1

Gloess, Rainer, Goos, Alexander, Sun, Feng, Zhou, Jin, Wu, Huachun, Ueno, Satoshi
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Volume:
63
Journal:
International Journal of Applied Electromagnetics and Mechanics
DOI:
10.3233/jae-209003
Date:
May, 2020
File:
PDF, 2.09 MB
2020
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