[IEEE 2020 IEEE International Memory Workshop (IMW) - Dresden, Germany (2020.5.17-2020.5.20)] 2020 IEEE International Memory Workshop (IMW) - Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices
Breuil, L., El Hajjam, G. K., Ramesh, S., Ajaykumar, A., Arreghini, A., Zhang, L., Sebaai, F., Nyns, L., Raymaekers, T., Rosmeulen, M., Van den Bosch, G., Furnemont, A.Year:
2020
DOI:
10.1109/IMW48823.2020.9108111
File:
PDF, 765 KB
2020