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511 Development of an ultra-precision planar positioning table system with a belt drive mechanism
ARIMA, Hiroshi, YOSHIOKA, Hayato, SHINNO, HidenoriVolume:
2006.6
Year:
2006
Journal:
The Proceedings of The Manufacturing & Machine Tool Conference
DOI:
10.1299/jsmemmt.2006.6.153
File:
PDF, 392 KB
2006