A Dummy-Pattern-Assisted Lift-Off Method for Small and...

IOP Conference Series Materials Science and Engineering 2020 / 03 Vol. 774

A Dummy-Pattern-Assisted Lift-Off Method for Small and Dense Nanostructures

Duan, Tianli, Xu, Kang, Wang, Yao, Ma, Xuhang, Zhang, Rui, Gu, Chengjie
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Volume:
774
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/774/1/012116
Date:
March, 2020
File:
PDF, 333 KB
2020
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