![](/img/cover-not-exists.png)
Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints
Qiao, Yan, Zhou, MengChu, Wu, NaiQi, Li, ZhiWu, Zhu, QingHuaYear:
2020
Journal:
IEEE Transactions on Systems, Man, and Cybernetics: Systems
DOI:
10.1109/TSMC.2020.2964032
File:
PDF, 1.85 MB
2020