Study on the mechanism of ultrasonic-assisted water...

Optics and Lasers in Engineering 2020 / 09 Vol. 132

Study on the mechanism of ultrasonic-assisted water confined laser micromachining of silicon

Zhou, Jia, Xu, Rongwei, Jiao, Hui, Bao, Jia-ding, Liu, Qing-yuan, Long, Yu-hong
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Volume:
132
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2020.106118
Date:
September, 2020
File:
PDF, 7.51 MB
2020
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