[IEEE 2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Lviv, Ukraine (2020.4.22-2020.4.26)] 2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Influence of Fringing Fields on Parallel Plate Capacitance for Capacitive MEMS Accelerometers

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