Reduction of carbon impurities in aluminium nitride from...

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The Journal of Physical Chemistry C 2020 / 06

Reduction of carbon impurities in aluminium nitride from time-resolved chemical vapour deposition using trimethylaluminum

Rouf, Polla, Sukkaew, Pitsiri, Ojamäe, Lars, Pedersen, Henrik
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Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.0c01724
Date:
June, 2020
File:
PDF, 1.44 MB
2020
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