Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering
Zhongtian Yang, Liya Zhu, Bing Yang, Liping Guo, Dejun FuVolume:
24
Language:
english
Pages:
4
DOI:
10.1007/s11595-009-5702-4
Date:
October, 2009
File:
PDF, 438 KB
english, 2009