Carbon-rich amorphous silicon carbide and silicon...

Optical Materials 2020 / 08 Vol. 106

Carbon-rich amorphous silicon carbide and silicon carbonitride films for silicon-based photoelectric devices and optical elements: Application from UV to mid-IR spectral range

Sha, Bo, Lukianov, Anatolii N., Dusheiko, Mykhailo G., Lozinskii, Volodymyr B., Klyui, Andriy N., Korbutyak, Dmytro V., Pritchin, Sergey E., Klyui, NickolaiI.
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Volume:
106
Journal:
Optical Materials
DOI:
10.1016/j.optmat.2020.109959
Date:
August, 2020
File:
PDF, 1.89 MB
2020
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