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Effect of the sputtering parameters on the structure and properties of Cu3N thin film materials
Xianyi Qian, Zhixin Huang, Zengli Cui, Jihua GuoVolume:
25
Language:
english
Pages:
3
DOI:
10.1007/s11595-010-0123-y
Date:
December, 2010
File:
PDF, 191 KB
english, 2010