[IEEE 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Hiroshima, Japan (2020.3.23-2020.3.26)] 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator
Hamza, Abdelli, Tsukamoto, Takashiro, Tanaka, ShujiYear:
2020
DOI:
10.1109/INERTIAL48129.2020.9090082
File:
PDF, 4.03 MB
2020