Toward a Self-Sensing Piezoresistive Pressure Sensor for...

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IEEE Sensors Journal 2020

Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration

Middelburg, L.M., van Zeijl, H.W., Vollebregt, S., Morana, B., Zhang, G.Q.
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Year:
2020
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2020.2998915
File:
PDF, 10.87 MB
2020
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