Influence of Nitrogen Content and Bias Voltage on Residual Stress and the Tribological and Mechanical Properties of CrAlN Films
Tang, Jian-Fu, Lin, Ching-Yen, Yang, Fu-Chi, Chang, Chi-LungVolume:
10
Journal:
Coatings
DOI:
10.3390/coatings10060546
Date:
June, 2020
File:
PDF, 3.58 MB
2020