Conformal doping strategy for fin structures: tailoring of...

Semiconductor Science and Technology 2020 / 05 Vol. 35; Iss. 5

Conformal doping strategy for fin structures: tailoring of dopant profile through multiple monolayer doping and capping layer control

Park, Chul Jin, Jung, Sang Min, Kim, Jin Hwan, Shin, Moo Whan
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Volume:
35
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab7bee
Date:
May, 2020
File:
PDF, 1.85 MB
2020
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