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[IEEE 2020 IEEE 4th Information Technology, Networking, Electronic and Automation Control Conference (ITNEC) - Chongqing, China (2020.6.12-2020.6.14)] 2020 IEEE 4th Information Technology, Networking, Electronic and Automation Control Conference (ITNEC) - K-means clustering with morphological filtering for silicon wafer grain defect detection
Chen, Xiaoyan, Zhao, Chundong, Chen, Jianyong, Zhang, Dongyang, Zhu, Kuifeng, Su, YanjieYear:
2020
DOI:
10.1109/ITNEC48623.2020.9084726
File:
PDF, 663 KB
2020