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Power supply for mid-frequency magnetron sputtering with a wide-range control of pulses parameters
Oskirko, V O, Zakharov, A Z, Solovyev, A A, Pavlov, A P, Rabotkin, S VVolume:
1488
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1488/1/012003
Date:
March, 2020
File:
PDF, 1.69 MB
2020