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Establishment and analysis of coupled dynamic model for dual-mass silicon micro-gyroscope
Wang, Zhanghui, Qiu, Anping, Shi, Qin, Zhang, TaoyuanVolume:
282
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/282/1/012019
Date:
December, 2017
File:
PDF, 833 KB
2017