Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2020 / 07 Vol. 38; Iss. 4
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Controlled removal of hydrogen atoms from H-terminated silicon surfaces
Alemansour, Hamed, Moheimani, S. O. Reza, Owen, James H. G., Randall, John N., Fuchs, EhudVolume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000241
Date:
July, 2020
File:
PDF, 2.30 MB
2020