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Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 6. Surface Reaction Process of Fluorocarbon Radicals (CFx).
HORI, Masaru, ITOH, Masafumi, GOTO, ToshioVolume:
75
Year:
1999
Journal:
Journal of Plasma and Fusion Research
DOI:
10.1585/jspf.75.813
File:
PDF, 545 KB
1999