Developments of Basic Researches on Fluorocarbon Plasmas...

Developments of Basic Researches on Fluorocarbon Plasmas for Material Processing. 6. Surface Reaction Process of Fluorocarbon Radicals (CFx).

HORI, Masaru, ITOH, Masafumi, GOTO, Toshio
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Volume:
75
Year:
1999
Journal:
Journal of Plasma and Fusion Research
DOI:
10.1585/jspf.75.813
File:
PDF, 545 KB
1999
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