Physics and Technology of Silicon Carbide Devices || PECVD...

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Physics and Technology of Silicon Carbide Devices || PECVD Amorphous Silicon Carbide (α-SiC) Layers for MEMS Applications

Hijikata, Yasuto
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Volume:
10.5772/34
Year:
2012
DOI:
10.5772/51224
File:
PDF, 813 KB
2012
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