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[IEEE 2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL) - Sozopol, Bulgaria (2019.9.6-2019.9.8)] 2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL) - Impact of Technological Operations Parameters on Moems Components Formation

Filipenko, Oleksandr, Chala, Olena, Bortnikova, Viktoriia, Sychova, Oksana, Botsman, Iryna
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Year:
2019
DOI:
10.1109/caol46282.2019.9019570
File:
PDF, 1.97 MB
2019
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