Non-Destructive Measurement of Surface Concentrations and...

Non-Destructive Measurement of Surface Concentrations and Junction Depths of Diffused Semiconductor Layers

Abe, Toshio, Nishi, Yoshio
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Volume:
9
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.9.428C
Date:
April, 1970
File:
PDF, 91 KB
1970
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