A novel gradient composition spreading and nanolayer...

Review of Scientific Instruments 2020 / 06 Vol. 91; Iss. 6

A novel gradient composition spreading and nanolayer stacking process for combinatorial thin-film materials library fabrication

Yan, Zongkai, Wu, Shuai, Song, Yu, Xiang, Yong, Zhu, Jun
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
91
Journal:
Review of Scientific Instruments
DOI:
10.1063/5.0011119
Date:
June, 2020
File:
PDF, 6.89 MB
2020
Conversion to is in progress
Conversion to is failed