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3D Integrated Coreless Microtransformer Processed by Femtosecond Laser Micro-nano Fabrication
Shan, Chao, Zhang, Chengjun, Liang, Jie, Yang, Qing, Bian, Hao, yong, Jiale, Hou, Xun, Chen, FengJournal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab9e4f
Date:
June, 2020
File:
PDF, 1.17 MB
2020