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One-Step Photolithographic Surface Patterning of Nanometer-Thick Gold Surfaces by Using a Commercial DLP Projector and the Fabrication of a Microheater
Gregorini, Michele, Grass, Robert N., Stark, Wendelin J.Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/acs.iecr.9b05837
Date:
June, 2020
File:
PDF, 4.61 MB
2020